FAQ

No, this is not possible because LUXOR targets are different from any other targets in the market. The metal disk (gold – platinum – gold/palladium) is pre-mounted on a push-fit holder.
So instead of having to replace a thin fragile metal disk, you can simple push the LUXOR target into place. No need for screw-drivers or other special tools.
Furthermore with LUXOR targets you are always assured of a perfect and reproducible contact between the holder and the electrode surface.
LUXOR uses 30 mm (about 1.2″) diameter targets. This size, combined with the specific positioning of the magnetron and electrodes, mostly avoids “race-tracking” phenomena (often seen on the bigger 57-60 mm targets) where the outer part of the target is consumed much faster then the inner part.
This means LUXOR targets need to be replaced less frequently then other targets.
LUXOR coaters also use very low sputtering currents, which means much less metal consumption. Typically we estimate about 2000-4000 coating cycles (depending on the applied coating thickness, sample cleanliness etc..) before replacement.

The number of cycles depends on the selected layer thickness per sputtering process. The layer thickness can be set between 1 nm and 50 nm for Luxor^Au and Luxor^Pt. Multiplied by 5, this corresponds approximately to the actual ablation of the target per sputter cycle.

Luxor^Pt and Luxor^Au SputterCoater work with fully automatic process parameters, so that the layer thickness is reproducible and the target ablation is well calculable. The targets cannot be completely consumed because they are no longer stable if the residual thickness is too thin. Spent targets can be recognized by the holes that appear in the target film.

Therefore we calculate:

• at 50 nm film thickness per cycle with max. 400 coating processes and
• at 1 nm film thickness per sputtering process with max. 8,000 cycles.