LUXOR sputter coater targets are different from all other targets on the market. The metal target disc (Au – Au/Pd – Pt) is pre-assembled on a push-fit holder.
Instead of having to replace a thin fragile metal disc, you can simply push the LUXOR target into place. You don’t need a screwdriver or other tools.
Moreover, LUXOR targets always ensure perfect and reproducible contact between the holder and the electrode surface.
LUXOR uses targets with a diameter of 30 mm (about 1.2″). This size, combined with the specific positioning of the magnetron and electrodes, mostly prevents “race-tracking” phenomena (often seen on the larger 57-60 mm targets) in which the outer part of the target is consumed much faster than the inner part.
This means that LUXOR targets need to be replaced less often than other targets.
LUXOR coaters also use very low sputter currents. This means that less material is consumed. Typically, we estimate about 2000-4000 coating cycles, depending on the required coating thickness and sample purity.